Multi-functioning AFM cantilever for mechanical tests: Indentation, strip bending and adhesion tests

Abstract

This paper reports on the development of a novel AFM cantilever and its application to various mechanical tests for characterizing micro/nano- structures. We have designed and fabricated rhombus-shaped AFM cantilevers capable of performing multifunctioning tasks by using single crystal silicon (SCS) micromachining techniques. Structural improvement of the cantilever has clearly solved the crucial problems resulted from using conventional simple beam-AFM cantilever for mechanical testings. After force-calibration of the cantilever, various mechanical tests such as indentation, strip bending and adhesion tests are performed to determine the mechanical behaviors in micro/nano-scale as well as topographic imaging. © 2006 IEEE.