File Download

There are no files associated with this item.

  Links for fulltext
     (May Require Subscription)
Supplementary

Article: An optical humidity sensor: A compact photonic chip integrated with artificial opal

TitleAn optical humidity sensor: A compact photonic chip integrated with artificial opal
Authors
KeywordsGallium nitride
Relative humidity
Optical humidity sensor
Artificial opal
Photonic integration
Issue Date2021
PublisherElsevier BV. The Journal's web site is located at http://www.elsevier.com/locate/snb
Citation
Sensors and Actuators B: Chemical, 2021, v. 349, p. article no. 130763 How to Cite?
AbstractA novel, miniaturized and easy-to-use optical sensor enabling accurate humidity measurement in real-time has been proposed in current study. This is achieved by the compact integration of a photonic chip with an artificial opal layer. The III-nitride chip with a size of 1 × 1 × 0.21 mm3 simultaneously provides two essential functions, i.e., photoemission and photodetection. The integrated opal film is comprised of silica powders with a hydrophilic nature, and its humidity-dependent light reflection can be precisely monitored by the on-chip detector without any aids of external optics. The optical sensing device shows a highly linear response in the relative humidity (RH) range of 3.8–90% and a sensitivity of 0.046–0.051 μA/%RH. The real-time monitoring function of the sensor has been demonstrated by mounting it on a facial mask which is used under various human breathing conditions. With the advantages of its compact size, ease of operation, high linearity and repeatability, large dynamic range, and fast response time, this cost-effective chip-scale optical sensor shows great potential in a wide range of practical humidity-sensing applications.
Persistent Identifierhttp://hdl.handle.net/10722/305356
ISSN
2023 Impact Factor: 8.0
2023 SCImago Journal Rankings: 1.475
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorYu, B-
dc.contributor.authorLuo, Y-
dc.contributor.authorChen, L-
dc.contributor.authorChu, Z-
dc.contributor.authorLi, KH-
dc.date.accessioned2021-10-20T10:08:15Z-
dc.date.available2021-10-20T10:08:15Z-
dc.date.issued2021-
dc.identifier.citationSensors and Actuators B: Chemical, 2021, v. 349, p. article no. 130763-
dc.identifier.issn0925-4005-
dc.identifier.urihttp://hdl.handle.net/10722/305356-
dc.description.abstractA novel, miniaturized and easy-to-use optical sensor enabling accurate humidity measurement in real-time has been proposed in current study. This is achieved by the compact integration of a photonic chip with an artificial opal layer. The III-nitride chip with a size of 1 × 1 × 0.21 mm3 simultaneously provides two essential functions, i.e., photoemission and photodetection. The integrated opal film is comprised of silica powders with a hydrophilic nature, and its humidity-dependent light reflection can be precisely monitored by the on-chip detector without any aids of external optics. The optical sensing device shows a highly linear response in the relative humidity (RH) range of 3.8–90% and a sensitivity of 0.046–0.051 μA/%RH. The real-time monitoring function of the sensor has been demonstrated by mounting it on a facial mask which is used under various human breathing conditions. With the advantages of its compact size, ease of operation, high linearity and repeatability, large dynamic range, and fast response time, this cost-effective chip-scale optical sensor shows great potential in a wide range of practical humidity-sensing applications.-
dc.languageeng-
dc.publisherElsevier BV. The Journal's web site is located at http://www.elsevier.com/locate/snb-
dc.relation.ispartofSensors and Actuators B: Chemical-
dc.subjectGallium nitride-
dc.subjectRelative humidity-
dc.subjectOptical humidity sensor-
dc.subjectArtificial opal-
dc.subjectPhotonic integration-
dc.titleAn optical humidity sensor: A compact photonic chip integrated with artificial opal-
dc.typeArticle-
dc.identifier.emailChu, Z: zqchu@eee.hku.hk-
dc.identifier.authorityChu, Z=rp02472-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1016/j.snb.2021.130763-
dc.identifier.scopuseid_2-s2.0-85115920624-
dc.identifier.hkuros328156-
dc.identifier.volume349-
dc.identifier.spagearticle no. 130763-
dc.identifier.epagearticle no. 130763-
dc.identifier.isiWOS:000707330900002-
dc.publisher.placeNetherlands-

Export via OAI-PMH Interface in XML Formats


OR


Export to Other Non-XML Formats