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Article: Combined out-of-plane and in-plane texture control in thin films using ion beam assisted deposition

TitleCombined out-of-plane and in-plane texture control in thin films using ion beam assisted deposition
Authors
Issue Date2001
Citation
Journal of Materials Research, 2001, v. 16, n. 1, p. 210-216 How to Cite?
AbstractComplete control of the texture of a film during growth requires the ability to determine the in-plane and out-of-plane texture simultaneously. We present both computer simulation and experimental evidence for the simultaneous establishment of out-of-plane and in-plane texture during ion beam assisted deposition of aluminum. Channeling along 〈110〉 directions (60° from the normal) creates a (220) out-of-plane orientation rather than the thermodynamically preferred (111) orientation. The ion beam also aligned 〈220〉 directions within the plane of the film. Measured x-ray pole figures confirmed the presence of a strong out-of-plane texture and the presence of two main, twin-related, in-plane texture components. We theoretically demonstrated that it is impossible to completely control both the in-plane and out-of-plane texture with a single ion beam in high-symmetry crystals and two ion beams must be employed to ensure complete texture control.
Persistent Identifierhttp://hdl.handle.net/10722/303183
ISSN
2023 Impact Factor: 2.7
2023 SCImago Journal Rankings: 0.569
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorDong, L.-
dc.contributor.authorSrolovitz, D. J.-
dc.contributor.authorWas, G. S.-
dc.contributor.authorZhao, Q.-
dc.contributor.authorRollett, A. D.-
dc.date.accessioned2021-09-15T08:24:48Z-
dc.date.available2021-09-15T08:24:48Z-
dc.date.issued2001-
dc.identifier.citationJournal of Materials Research, 2001, v. 16, n. 1, p. 210-216-
dc.identifier.issn0884-2914-
dc.identifier.urihttp://hdl.handle.net/10722/303183-
dc.description.abstractComplete control of the texture of a film during growth requires the ability to determine the in-plane and out-of-plane texture simultaneously. We present both computer simulation and experimental evidence for the simultaneous establishment of out-of-plane and in-plane texture during ion beam assisted deposition of aluminum. Channeling along 〈110〉 directions (60° from the normal) creates a (220) out-of-plane orientation rather than the thermodynamically preferred (111) orientation. The ion beam also aligned 〈220〉 directions within the plane of the film. Measured x-ray pole figures confirmed the presence of a strong out-of-plane texture and the presence of two main, twin-related, in-plane texture components. We theoretically demonstrated that it is impossible to completely control both the in-plane and out-of-plane texture with a single ion beam in high-symmetry crystals and two ion beams must be employed to ensure complete texture control.-
dc.languageeng-
dc.relation.ispartofJournal of Materials Research-
dc.titleCombined out-of-plane and in-plane texture control in thin films using ion beam assisted deposition-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1557/JMR.2001.0033-
dc.identifier.scopuseid_2-s2.0-0035239712-
dc.identifier.volume16-
dc.identifier.issue1-
dc.identifier.spage210-
dc.identifier.epage216-
dc.identifier.isiWOS:000166281200033-

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