Chemical vapor deposited MoS2 thin layers and their applications

Abstract

Significant efforts have been devoted to prepare MoS2 thin layers, including scotch tape micromechanical exfoliation, intercalation assisted exfoliation, solution exfoliation, physical vapor deposition, hydrothermal synthesis, electrochemical synthesis, sulfurization of molybdenum oxides and thermolysis of the precursor containing Mo and S atoms. However, MoS2 tends to form zero-dimensional closed structures or one-dimensional nano-rod structures. The synthetic approach to obtain high quality and large-area MoS2 atomic thin layers is still rare. Here, we shall discuss several different approaches for synthesizing MoS2 thin sheets based on chemical vapor deposition. Spectroscopic and electrical properties of these films shall also be discussed. © The Electrochemical Society.