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Article: Investigation in the dynamic characteristic of the micro thermal sensor system

TitleInvestigation in the dynamic characteristic of the micro thermal sensor system
Authors
Liu, KuiYuan, WeizhengMa, BingheDeng, JinjunJiang, Chengyu
KeywordsThermal sensor MEMS
Drive circuit
Response frequency
Time constant
Issue Date2006
Citation
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2006, v. 27, n. 6, p. 648-652 How to Cite?
AbstractThrough analyzing the operating principle of the micro thermal sensor, associating with the two types of drive circuits, the calculation and analysis methods of temporal and frequency characteristics of MEMS thermal sensor are got. Then the first order constant current sensor system and the second order constant temperature sensor system are investigated, and the design basis of the temporal and frequency characteristics of this type sensor is presented, which can offer reference to thermal sensor's device design and performance analysis.
Persistent Identifierhttp://hdl.handle.net/10722/265773
ISSN
0254-3087
2023 SCImago Journal Rankings: 0.281

 

DC FieldValueLanguage
dc.contributor.authorLiu, Kui-
dc.contributor.authorYuan, Weizheng-
dc.contributor.authorMa, Binghe-
dc.contributor.authorDeng, Jinjun-
dc.contributor.authorJiang, Chengyu-
dc.date.accessioned2018-12-03T01:21:39Z-
dc.date.available2018-12-03T01:21:39Z-
dc.date.issued2006-
dc.identifier.citationYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2006, v. 27, n. 6, p. 648-652-
dc.identifier.issn0254-3087-
dc.identifier.urihttp://hdl.handle.net/10722/265773-
dc.description.abstractThrough analyzing the operating principle of the micro thermal sensor, associating with the two types of drive circuits, the calculation and analysis methods of temporal and frequency characteristics of MEMS thermal sensor are got. Then the first order constant current sensor system and the second order constant temperature sensor system are investigated, and the design basis of the temporal and frequency characteristics of this type sensor is presented, which can offer reference to thermal sensor's device design and performance analysis.-
dc.languageeng-
dc.relation.ispartofYi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument-
dc.subjectThermal sensor MEMS-
dc.subjectDrive circuit-
dc.subjectResponse frequency-
dc.subjectTime constant-
dc.titleInvestigation in the dynamic characteristic of the micro thermal sensor system-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-33748929668-
dc.identifier.volume27-
dc.identifier.issue6-
dc.identifier.spage648-
dc.identifier.epage652-
dc.identifier.issnl0254-3087-

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