Investigation of a micro shear stress sensor using the geometrical moire effect

Abstract

An optical method of detection applicable to shear stress sensors, which were based on the geometrical moire effect has been presented. The moire pattern shift as a result of the displacement of the floating element of the sensor structure. The design of sensor structure linear and sensitivity, the dynamic response of the sensor, and the characteristic of the moire fringe pattern has been demonstrated. Designed results indicate a mechanical sensitivity of 0. 066 μm/Pa, a resonant frequency of 8. 16 kHz, and a moire amplification of 20.