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Article: Polymeric micromechanical components with tunable stiffness

TitlePolymeric micromechanical components with tunable stiffness
Authors
Manias, EChen, JFang, NZhang, X
Issue Date2001
PublisherAIP Publishing LLC.
Citation
Applied Physics Letters, 2001, v. 79 n. 11, p. 1700-1702 How to Cite?
DOI: http://dx.doi.org/10.1063/1.1400084
AbstractWe present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.
Persistent Identifierhttp://hdl.handle.net/10722/262577
ISSN
0003-6951
2023 Impact Factor: 3.5
2023 SCImago Journal Rankings: 0.976
ISI Accession Number ID
WOS:000170800700039

 

DC FieldValueLanguage
dc.contributor.authorManias, E-
dc.contributor.authorChen, J-
dc.contributor.authorFang, N-
dc.contributor.authorZhang, X-
dc.date.accessioned2018-10-02T07:24:19Z-
dc.date.available2018-10-02T07:24:19Z-
dc.date.issued2001-
dc.identifier.citationApplied Physics Letters, 2001, v. 79 n. 11, p. 1700-1702-
dc.identifier.issn0003-6951-
dc.identifier.urihttp://hdl.handle.net/10722/262577-
dc.description.abstractWe present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.-
dc.languageeng-
dc.publisherAIP Publishing LLC.-
dc.relation.ispartofApplied Physics Letters-
dc.titlePolymeric micromechanical components with tunable stiffness-
dc.typeArticle-
dc.identifier.emailZhang, X: president@hku.hk-
dc.identifier.authorityZhang, X=rp02411-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1063/1.1400084-
dc.identifier.scopuseid_2-s2.0-0035839822-
dc.identifier.volume79-
dc.identifier.issue11-
dc.identifier.spage1700-
dc.identifier.epage1702-
dc.identifier.isiWOS:000170800700039-
dc.publisher.placeUnited States-
dc.identifier.issnl0003-6951-

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