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- Publisher Website: 10.1109/TED.2016.2565691
- Scopus: eid_2-s2.0-84971473605
- WOS: WOS:000378607100031
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Article: N2-Plasma-Treated Ga2O3(Gd2O3) as Interface Passivation Layer for Ge MOS Capacitor With HfTiON Gate Dielectric
Title | N2-Plasma-Treated Ga2O3(Gd2O3) as Interface Passivation Layer for Ge MOS Capacitor With HfTiON Gate Dielectric |
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Authors | |
Keywords | Ga2O3(Gd2O3) (GGO) interlayer Ge MOS interface-state density stacked gate-dielectric |
Issue Date | 2016 |
Citation | IEEE Transactions on Electron Devices, 2016, v. 63, p. 2838-2843 How to Cite? |
Persistent Identifier | http://hdl.handle.net/10722/247385 |
ISSN | 2023 Impact Factor: 2.9 2023 SCImago Journal Rankings: 0.785 |
ISI Accession Number ID |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Huang, Y | - |
dc.contributor.author | Xu, JP | - |
dc.contributor.author | Liu, L | - |
dc.contributor.author | Lai, PT | - |
dc.contributor.author | Tang, WM | - |
dc.date.accessioned | 2017-10-18T08:26:27Z | - |
dc.date.available | 2017-10-18T08:26:27Z | - |
dc.date.issued | 2016 | - |
dc.identifier.citation | IEEE Transactions on Electron Devices, 2016, v. 63, p. 2838-2843 | - |
dc.identifier.issn | 0018-9383 | - |
dc.identifier.uri | http://hdl.handle.net/10722/247385 | - |
dc.language | eng | - |
dc.relation.ispartof | IEEE Transactions on Electron Devices | - |
dc.subject | Ga2O3(Gd2O3) (GGO) interlayer | - |
dc.subject | Ge MOS | - |
dc.subject | interface-state density | - |
dc.subject | stacked gate-dielectric | - |
dc.title | N2-Plasma-Treated Ga2O3(Gd2O3) as Interface Passivation Layer for Ge MOS Capacitor With HfTiON Gate Dielectric | - |
dc.type | Article | - |
dc.identifier.email | Lai, PT: laip@eee.hku.hk | - |
dc.identifier.authority | Lai, PT=rp00130 | - |
dc.identifier.doi | 10.1109/TED.2016.2565691 | - |
dc.identifier.scopus | eid_2-s2.0-84971473605 | - |
dc.identifier.hkuros | 279975 | - |
dc.identifier.volume | 63 | - |
dc.identifier.spage | 2838 | - |
dc.identifier.epage | 2843 | - |
dc.identifier.eissn | 1557-9646 | - |
dc.identifier.isi | WOS:000378607100031 | - |
dc.identifier.issnl | 0018-9383 | - |