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- Publisher Website: 10.1021/acs.langmuir.5b00568
- Scopus: eid_2-s2.0-84928966671
- WOS: WOS:000354154100024
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Article: Centimeter-Scale Subwavelength Photolithography Using Metal-Coated Elastomeric Photomasks with Modulated Light Intensity at the Oblique Sidewalls
Title | Centimeter-Scale Subwavelength Photolithography Using Metal-Coated Elastomeric Photomasks with Modulated Light Intensity at the Oblique Sidewalls |
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Authors | |
Issue Date | 2015 |
Citation | Langmuir, 2015, v. 31, p. 5005-5013 How to Cite? |
Persistent Identifier | http://hdl.handle.net/10722/214975 |
ISSN | 2023 Impact Factor: 3.7 2023 SCImago Journal Rankings: 0.786 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Wu, J | - |
dc.contributor.author | Liu, Y | - |
dc.contributor.author | Guo, Y | - |
dc.contributor.author | Feng, S | - |
dc.contributor.author | Zou, B | - |
dc.contributor.author | Mao, H | - |
dc.contributor.author | Yu, C | - |
dc.contributor.author | Tian, D | - |
dc.contributor.author | Huang, W | - |
dc.contributor.author | Huo, F | - |
dc.date.accessioned | 2015-08-21T12:15:41Z | - |
dc.date.available | 2015-08-21T12:15:41Z | - |
dc.date.issued | 2015 | - |
dc.identifier.citation | Langmuir, 2015, v. 31, p. 5005-5013 | - |
dc.identifier.issn | 0743-7463 | - |
dc.identifier.uri | http://hdl.handle.net/10722/214975 | - |
dc.language | eng | - |
dc.relation.ispartof | Langmuir | - |
dc.title | Centimeter-Scale Subwavelength Photolithography Using Metal-Coated Elastomeric Photomasks with Modulated Light Intensity at the Oblique Sidewalls | - |
dc.type | Article | - |
dc.identifier.email | Yu, C: chyu1@hku.hk | - |
dc.identifier.authority | Yu, C=rp01930 | - |
dc.identifier.doi | 10.1021/acs.langmuir.5b00568 | - |
dc.identifier.scopus | eid_2-s2.0-84928966671 | - |
dc.identifier.hkuros | 249156 | - |
dc.identifier.volume | 31 | - |
dc.identifier.spage | 5005 | - |
dc.identifier.epage | 5013 | - |
dc.identifier.eissn | 1520-5827 | - |
dc.identifier.isi | WOS:000354154100024 | - |
dc.identifier.issnl | 0743-7463 | - |