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- Publisher Website: 10.1109/TASE.2009.2021980
- Scopus: eid_2-s2.0-70350017971
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Article: Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation
Title | Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation |
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Authors | |
Keywords | Visual servoing Piezoelectric actuation Parallel mechanism Motion control Micromanipulation Flexure mechanism |
Issue Date | 2009 |
Citation | IEEE Transactions on Automation Science and Engineering, 2009, v. 6, n. 4, p. 710-719 How to Cite? |
Abstract | This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 μm × 260 μm with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 μm respectively, can be achieved by the micromanipulator. © 2006 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/213067 |
ISSN | 2023 Impact Factor: 5.9 2023 SCImago Journal Rankings: 2.144 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Xu, Qingsong | - |
dc.contributor.author | Li, Yangmin | - |
dc.contributor.author | Xi, Ning | - |
dc.date.accessioned | 2015-07-28T04:06:02Z | - |
dc.date.available | 2015-07-28T04:06:02Z | - |
dc.date.issued | 2009 | - |
dc.identifier.citation | IEEE Transactions on Automation Science and Engineering, 2009, v. 6, n. 4, p. 710-719 | - |
dc.identifier.issn | 1545-5955 | - |
dc.identifier.uri | http://hdl.handle.net/10722/213067 | - |
dc.description.abstract | This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 μm × 260 μm with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 μm respectively, can be achieved by the micromanipulator. © 2006 IEEE. | - |
dc.language | eng | - |
dc.relation.ispartof | IEEE Transactions on Automation Science and Engineering | - |
dc.subject | Visual servoing | - |
dc.subject | Piezoelectric actuation | - |
dc.subject | Parallel mechanism | - |
dc.subject | Motion control | - |
dc.subject | Micromanipulation | - |
dc.subject | Flexure mechanism | - |
dc.title | Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation | - |
dc.type | Article | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1109/TASE.2009.2021980 | - |
dc.identifier.scopus | eid_2-s2.0-70350017971 | - |
dc.identifier.volume | 6 | - |
dc.identifier.issue | 4 | - |
dc.identifier.spage | 710 | - |
dc.identifier.epage | 719 | - |
dc.identifier.isi | WOS:000270035600013 | - |
dc.identifier.issnl | 1545-5955 | - |