Improvement of reconstruction algorithm of AFM scanning images

Abstract

Atomic force microscope (AFM) images contain distortions induced by the finite size of the tip. Reconstruction of the images allows one to remove the influence of tip shape and analyze the image at the nano-scale. However there are a lot of errors in the reconstruction of the image using blind tip evaluation, and these errors can be eliminated with the new method proposed in the paper based on pre-estimation of the tip. This method builds the tip model based on the zoning of the probe shape, and reconstructs the image by deconvolution of the tip model in order to obtain close to real surface of the sample. This paper gives steps of the algorithm in detail. The simulation and experimental results show that the errors from reconstructing AFM image are reduced, and the reconstructed image can present more surface information of the sample.