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Article: Automated nanomanufacturing system to assemble carbon nanotube based devices

TitleAutomated nanomanufacturing system to assemble carbon nanotube based devices
Authors
KeywordsDielectrophoretic manipulation
Carbon nanotube
Deposition
Issue Date2009
Citation
International Journal of Robotics Research, 2009, v. 28, n. 4, p. 523-536 How to Cite?
AbstractIn this paper we report the design and implementation of a novel automated manufacturing system for carbon nanotube (CNT)-based nanodevices, which integrates a new dielectrophoretic (DEP) microchamber into a robotic-based deposition workstation. The microchamber has been fabricated to separate and select CNTs with the desired electronic property by using DEP force. Moreover, a series of tools for mass-producing consistent nanodevices has been developed with the CNT deposition workstation, such as computer-controllable micromanipulators and a micro-active nozzle. Detailed experimental studies of the CNT separation and deposition processes have been performed on both single-walled carbon nanotubes (SWCNTs) and multi-walled carbon nanotubes (MWCNTs). Preliminary results show that CNTs could be manipulated to multiple pairs of microelectrodes repeatedly. Consistent I-V characteristics and CNT formations of the fabricated devices were obtained. The yield of semi-conducting CNTs was also increased by using our system. Therefore, by using the proposed CNT separation and deposition system, CNT-based nanodevices with specific and consistent electronic properties can be manufactured automatically and effectively.
Persistent Identifierhttp://hdl.handle.net/10722/213042
ISSN
2023 Impact Factor: 7.5
2023 SCImago Journal Rankings: 4.346
ISI Accession Number ID

 

DC FieldValueLanguage
dc.contributor.authorLai, King Wai Chui-
dc.contributor.authorXi, Ning-
dc.contributor.authorFung, Carmen Kar Man-
dc.contributor.authorZhang, Jiangbo-
dc.contributor.authorChen, Hongzhi-
dc.contributor.authorLuo, Yilun-
dc.contributor.authorWejinya, Uchechukwu C.-
dc.date.accessioned2015-07-28T04:05:52Z-
dc.date.available2015-07-28T04:05:52Z-
dc.date.issued2009-
dc.identifier.citationInternational Journal of Robotics Research, 2009, v. 28, n. 4, p. 523-536-
dc.identifier.issn0278-3649-
dc.identifier.urihttp://hdl.handle.net/10722/213042-
dc.description.abstractIn this paper we report the design and implementation of a novel automated manufacturing system for carbon nanotube (CNT)-based nanodevices, which integrates a new dielectrophoretic (DEP) microchamber into a robotic-based deposition workstation. The microchamber has been fabricated to separate and select CNTs with the desired electronic property by using DEP force. Moreover, a series of tools for mass-producing consistent nanodevices has been developed with the CNT deposition workstation, such as computer-controllable micromanipulators and a micro-active nozzle. Detailed experimental studies of the CNT separation and deposition processes have been performed on both single-walled carbon nanotubes (SWCNTs) and multi-walled carbon nanotubes (MWCNTs). Preliminary results show that CNTs could be manipulated to multiple pairs of microelectrodes repeatedly. Consistent I-V characteristics and CNT formations of the fabricated devices were obtained. The yield of semi-conducting CNTs was also increased by using our system. Therefore, by using the proposed CNT separation and deposition system, CNT-based nanodevices with specific and consistent electronic properties can be manufactured automatically and effectively.-
dc.languageeng-
dc.relation.ispartofInternational Journal of Robotics Research-
dc.subjectDielectrophoretic manipulation-
dc.subjectCarbon nanotube-
dc.subjectDeposition-
dc.titleAutomated nanomanufacturing system to assemble carbon nanotube based devices-
dc.typeArticle-
dc.description.naturelink_to_subscribed_fulltext-
dc.identifier.doi10.1177/0278364908097585-
dc.identifier.scopuseid_2-s2.0-62849090954-
dc.identifier.volume28-
dc.identifier.issue4-
dc.identifier.spage523-
dc.identifier.epage536-
dc.identifier.eissn1741-3176-
dc.identifier.isiWOS:000264254700009-
dc.identifier.issnl0278-3649-

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