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- Publisher Website: 10.1109/NEMS.2007.352168
- Scopus: eid_2-s2.0-34548137686
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Conference Paper: A study on theoretical nano forces in AFM based nanomanipulation
| Title | A study on theoretical nano forces in AFM based nanomanipulation |
|---|---|
| Authors | |
| Keywords | Force curve Atomic force microscope (AFM) Nano force analysis Nanomanipulation |
| Issue Date | 2007 |
| Citation | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 2007, p. 917-921 How to Cite? |
| Abstract | As it is important to understand the basic mechanics principle in nanofabrication process, much research has been done about nano mechanics with different tools in different nano enviroments, and various kinds of nano force formula have been proposed. However, as the special case of AFM based nanomanipulation is considered, little about its mechanics principle under the micro probe's operation is known, such as what kinds of nano forces are the decisive factors and how they work, which are important to perform accurate control in nanomanipulation. To explore this subject, nano forces among tip, substrate and particle are analyzed, and simulation & experiments are performed to verify the rationality of the analysis. © 2007 IEEE. |
| Persistent Identifier | http://hdl.handle.net/10722/212938 |
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Tian, Xiaojun | - |
| dc.contributor.author | Wang, Yuechao | - |
| dc.contributor.author | Xi, Ning | - |
| dc.contributor.author | Dong, Zaili | - |
| dc.date.accessioned | 2015-07-28T04:05:30Z | - |
| dc.date.available | 2015-07-28T04:05:30Z | - |
| dc.date.issued | 2007 | - |
| dc.identifier.citation | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 2007, p. 917-921 | - |
| dc.identifier.uri | http://hdl.handle.net/10722/212938 | - |
| dc.description.abstract | As it is important to understand the basic mechanics principle in nanofabrication process, much research has been done about nano mechanics with different tools in different nano enviroments, and various kinds of nano force formula have been proposed. However, as the special case of AFM based nanomanipulation is considered, little about its mechanics principle under the micro probe's operation is known, such as what kinds of nano forces are the decisive factors and how they work, which are important to perform accurate control in nanomanipulation. To explore this subject, nano forces among tip, substrate and particle are analyzed, and simulation & experiments are performed to verify the rationality of the analysis. © 2007 IEEE. | - |
| dc.language | eng | - |
| dc.relation.ispartof | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 | - |
| dc.subject | Force curve | - |
| dc.subject | Atomic force microscope (AFM) | - |
| dc.subject | Nano force analysis | - |
| dc.subject | Nanomanipulation | - |
| dc.title | A study on theoretical nano forces in AFM based nanomanipulation | - |
| dc.type | Conference_Paper | - |
| dc.description.nature | link_to_subscribed_fulltext | - |
| dc.identifier.doi | 10.1109/NEMS.2007.352168 | - |
| dc.identifier.scopus | eid_2-s2.0-34548137686 | - |
| dc.identifier.spage | 917 | - |
| dc.identifier.epage | 921 | - |