Microfluidic end effector for manufacturing of nano devices

Abstract

In this paper, a new pneumatic end effector system for micro/nano fluidic handling, nanomanufacturing, and micro/nano manipulation is presented. The new micro pneumatic end-effector system consists of a DC micro-diaphragm pump and compressor, one region of flexible latex tube, a Polyvinylidene Fluoride (PVDF) sensor for in-situ measurement of micro force, and a micro steel tip. The micro steel tip of the new pneumatic end effector system has an internal diameter (ID) of 20μm used for handling nano entities such as carbon nanotubes, DNA, micro/nano particles as well as for microfluidic handling and droplet control. The DC micro-diaphragm pump is automatically controlled via a voltage driver interfaced with a computer in order to effectively and efficiently control suction force and pressure during microfluidic handling and droplet control in nano maufacturing. The new pneumatic end effector system with force sensing can significantly improve the success rate for handling/depositing micro/nano entities in the case of carbon nanotubes. The experimental results show the success rate of placing carbon nantubes between electrodes can reach close to 80%. Ultimately, the technology will provide a critical and major step towards the development of automated manufacturing process for batch assembly of micro devices, manufacturing of nano devices, microfluidic droplet control, and drug delivery. © 2006 IEEE.