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- Publisher Website: 10.1109/TDMR.2013.2275191
- Scopus: eid_2-s2.0-84896456043
- WOS: WOS:000335226600025
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Article: Improved Performance of InGaZnO Thin-Film Transistor with HfLaO Gate Dielectric Annealed in Oxygen
Title | Improved Performance of InGaZnO Thin-Film Transistor with HfLaO Gate Dielectric Annealed in Oxygen |
---|---|
Authors | |
Keywords | Amorphous InGaZnO (a-IGZO) annealing HfLaO high-k Mobility thin-film transistor (TFT) |
Issue Date | 2014 |
Citation | IEEE Transactions on Device and Materials Reliability, 2014, vol.14, p. pp177-181 How to Cite? |
Persistent Identifier | http://hdl.handle.net/10722/202915 |
ISSN | 2023 Impact Factor: 2.5 2023 SCImago Journal Rankings: 0.436 |
ISI Accession Number ID |
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lai, PT | en_US |
dc.contributor.author | QIAN, L | en_US |
dc.date.accessioned | 2014-09-19T10:09:54Z | - |
dc.date.available | 2014-09-19T10:09:54Z | - |
dc.date.issued | 2014 | en_US |
dc.identifier.citation | IEEE Transactions on Device and Materials Reliability, 2014, vol.14, p. pp177-181 | en_US |
dc.identifier.issn | 1530-4388 | - |
dc.identifier.uri | http://hdl.handle.net/10722/202915 | - |
dc.language | eng | en_US |
dc.relation.ispartof | IEEE Transactions on Device and Materials Reliability | en_US |
dc.subject | Amorphous InGaZnO (a-IGZO) | - |
dc.subject | annealing | - |
dc.subject | HfLaO | - |
dc.subject | high-k | - |
dc.subject | Mobility | - |
dc.subject | thin-film transistor (TFT) | - |
dc.title | Improved Performance of InGaZnO Thin-Film Transistor with HfLaO Gate Dielectric Annealed in Oxygen | en_US |
dc.type | Article | en_US |
dc.identifier.email | Lai, PT: laip@eee.hku.hk | en_US |
dc.identifier.authority | Lai, PT=rp00130 | en_US |
dc.identifier.doi | 10.1109/TDMR.2013.2275191 | - |
dc.identifier.scopus | eid_2-s2.0-84896456043 | - |
dc.identifier.hkuros | 240492 | en_US |
dc.identifier.volume | 14 | en_US |
dc.identifier.spage | 177 | en_US |
dc.identifier.epage | 181 | en_US |
dc.identifier.eissn | 1558-2574 | - |
dc.identifier.isi | WOS:000335226600025 | - |
dc.identifier.issnl | 1530-4388 | - |