Showing results 1 to 1 of 1
Title | Author(s) | Issue Date | |
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Self-limited self-perfection by liquefaction for sub-20nm trench/line fabrication Journal:Nanotechnology | 2009 |
Title | Author(s) | Issue Date | |
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Self-limited self-perfection by liquefaction for sub-20nm trench/line fabrication Journal:Nanotechnology | 2009 |