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Article: Patterning Micro- and Nano-Structured FePt by Direct Imprint Lithography

TitlePatterning Micro- and Nano-Structured FePt by Direct Imprint Lithography
Authors
Li, GJDong, QXin, JZLeung, CWLai, PTWong, WYPong, PWT
KeywordsDirect imprint lithography
FePt
Micro-structure
Nano-structure
Patterning
Issue Date2013
Citation
Microelectronic Engineering, 2013, v. 110, p. 192 How to Cite?
DOI: http://dx.doi.org/10.1016/j.mee.2013.03.135
Persistent Identifierhttp://hdl.handle.net/10722/185879
ISSN
0167-9317
2021 Impact Factor: 2.662
2020 SCImago Journal Rankings: 0.553
ISI Accession Number ID
WOS:000326003600037

 

DC FieldValueLanguage
dc.contributor.authorLi, GJen_US
dc.contributor.authorDong, Qen_US
dc.contributor.authorXin, JZen_US
dc.contributor.authorLeung, CWen_US
dc.contributor.authorLai, PTen_US
dc.contributor.authorWong, WYen_US
dc.contributor.authorPong, PWTen_US
dc.date.accessioned2013-08-20T11:44:11Z-
dc.date.available2013-08-20T11:44:11Z-
dc.date.issued2013en_US
dc.identifier.citationMicroelectronic Engineering, 2013, v. 110, p. 192en_US
dc.identifier.issn0167-9317-
dc.identifier.urihttp://hdl.handle.net/10722/185879-
dc.languageengen_US
dc.relation.ispartofMicroelectronic Engineeringen_US
dc.subjectDirect imprint lithography-
dc.subjectFePt-
dc.subjectMicro-structure-
dc.subjectNano-structure-
dc.subjectPatterning-
dc.titlePatterning Micro- and Nano-Structured FePt by Direct Imprint Lithographyen_US
dc.typeArticleen_US
dc.identifier.emailLai, PT: laip@eee.hku.hken_US
dc.identifier.emailPong, PWT: ppong@eee.hku.hken_US
dc.identifier.authorityLai, PT=rp00130en_US
dc.identifier.authorityPong, PWT=rp00217en_US
dc.identifier.doi10.1016/j.mee.2013.03.135-
dc.identifier.scopuseid_2-s2.0-84885186631-
dc.identifier.hkuros219720en_US
dc.identifier.hkuros227867-
dc.identifier.volume110en_US
dc.identifier.spage192en_US
dc.identifier.epage192en_US
dc.identifier.isiWOS:000326003600037-
dc.identifier.issnl0167-9317-

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