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Conference Paper: ORIENTATION OF CRYSTAL THIN LAYER WITH DIAMOND STRUCTURE USING RAMAN SCATTERED LIGHT.

TitleORIENTATION OF CRYSTAL THIN LAYER WITH DIAMOND STRUCTURE USING RAMAN SCATTERED LIGHT.
Authors
Wu, HuashengLao, PudongWu, JiangenQu, Fengyuan
Issue Date1986
Citation
Conference On Solid State Devices And Materials, 1986, p. 419-422 How to Cite?
AbstractA method for determining the orientation of an arbitrarily oriented crystal thin layer using Raman scattered light has been proposed. The intensity of Raman scattered light from the diamond structure thin layer as a function of both the normal of the thin layer and the polarization direction of incident light is derived, and the orientation of the thin layer is then determined by means of four extrema of this function. The orientation results of this method for silicon wafers are compared with that determined by the X-ray method.
Persistent Identifierhttp://hdl.handle.net/10722/176144

 

DC FieldValueLanguage
dc.contributor.authorWu, Huashengen_US
dc.contributor.authorLao, Pudongen_US
dc.contributor.authorWu, Jiangenen_US
dc.contributor.authorQu, Fengyuanen_US
dc.date.accessioned2012-11-26T09:06:24Z-
dc.date.available2012-11-26T09:06:24Z-
dc.date.issued1986en_US
dc.identifier.citationConference On Solid State Devices And Materials, 1986, p. 419-422en_US
dc.identifier.urihttp://hdl.handle.net/10722/176144-
dc.description.abstractA method for determining the orientation of an arbitrarily oriented crystal thin layer using Raman scattered light has been proposed. The intensity of Raman scattered light from the diamond structure thin layer as a function of both the normal of the thin layer and the polarization direction of incident light is derived, and the orientation of the thin layer is then determined by means of four extrema of this function. The orientation results of this method for silicon wafers are compared with that determined by the X-ray method.en_US
dc.languageengen_US
dc.relation.ispartofConference on Solid State Devices and Materialsen_US
dc.titleORIENTATION OF CRYSTAL THIN LAYER WITH DIAMOND STRUCTURE USING RAMAN SCATTERED LIGHT.en_US
dc.typeConference_Paperen_US
dc.identifier.emailWu, Huasheng: hswu@hkucc.hku.hken_US
dc.identifier.authorityWu, Huasheng=rp00813en_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0022917189en_US
dc.identifier.spage419en_US
dc.identifier.epage422en_US
dc.identifier.scopusauthoridWu, Huasheng=7405584367en_US
dc.identifier.scopusauthoridLao, Pudong=6603399520en_US
dc.identifier.scopusauthoridWu, Jiangen=7409259986en_US
dc.identifier.scopusauthoridQu, Fengyuan=7006228330en_US

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