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Article: Surface hydrogen effects on Ge surface segregation during silicon gas source molecular beam epitaxy
Title | Surface hydrogen effects on Ge surface segregation during silicon gas source molecular beam epitaxy |
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Authors | |
Issue Date | 1994 |
Publisher | Institute of Pure and Applied Physics. The Journal's web site is located at http://www.ipap.jp/jjap/index.htm |
Citation | Japanese Journal Of Applied Physics, Part 1: Regular Papers And Short Notes And Review Papers, 1994, v. 33 n. 4 B, p. 2311-2316 How to Cite? |
Abstract | Using reflection-high-energy-electron diffraction (RHEED), the temperature dependence of Ge surface segregation during silicon gas source molecular beam epitaxy (Si-GSMBE) from hydride sources was studied, and it was found that surface hydrogen, which is produced by the dissociation of Si2H6 and GeH4 on the growing surface, may act as a growth-controlling surfactant. Comparison with results from solid source growth results suggests that hydrogen significantly suppresses the Ge segregation. Segregation kinetics were examined through simulation studies and the results indicate that the addition of surface hydrogen to the system inhibits segregation due to a lowering of the Gibbs heat of segregation. |
Persistent Identifier | http://hdl.handle.net/10722/174708 |
ISSN | 2023 Impact Factor: 1.5 2023 SCImago Journal Rankings: 0.307 |
ISI Accession Number ID |
DC Field | Value | Language |
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dc.contributor.author | Ohtani, Noboru | en_US |
dc.contributor.author | Mokler, Scott | en_US |
dc.contributor.author | Xie, Mao Hai | en_US |
dc.contributor.author | Zhang, Jing | en_US |
dc.contributor.author | Joyce, Bruce A | en_US |
dc.date.accessioned | 2012-11-26T08:46:59Z | - |
dc.date.available | 2012-11-26T08:46:59Z | - |
dc.date.issued | 1994 | en_US |
dc.identifier.citation | Japanese Journal Of Applied Physics, Part 1: Regular Papers And Short Notes And Review Papers, 1994, v. 33 n. 4 B, p. 2311-2316 | en_US |
dc.identifier.issn | 0021-4922 | en_US |
dc.identifier.uri | http://hdl.handle.net/10722/174708 | - |
dc.description.abstract | Using reflection-high-energy-electron diffraction (RHEED), the temperature dependence of Ge surface segregation during silicon gas source molecular beam epitaxy (Si-GSMBE) from hydride sources was studied, and it was found that surface hydrogen, which is produced by the dissociation of Si2H6 and GeH4 on the growing surface, may act as a growth-controlling surfactant. Comparison with results from solid source growth results suggests that hydrogen significantly suppresses the Ge segregation. Segregation kinetics were examined through simulation studies and the results indicate that the addition of surface hydrogen to the system inhibits segregation due to a lowering of the Gibbs heat of segregation. | en_US |
dc.language | eng | en_US |
dc.publisher | Institute of Pure and Applied Physics. The Journal's web site is located at http://www.ipap.jp/jjap/index.htm | en_US |
dc.relation.ispartof | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | en_US |
dc.title | Surface hydrogen effects on Ge surface segregation during silicon gas source molecular beam epitaxy | en_US |
dc.type | Article | en_US |
dc.identifier.email | Xie, Mao Hai: mhxie@hku.hk | en_US |
dc.identifier.authority | Xie, Mao Hai=rp00818 | en_US |
dc.description.nature | link_to_subscribed_fulltext | en_US |
dc.identifier.scopus | eid_2-s2.0-0028405023 | en_US |
dc.identifier.volume | 33 | en_US |
dc.identifier.issue | 4 B | en_US |
dc.identifier.spage | 2311 | en_US |
dc.identifier.epage | 2316 | en_US |
dc.identifier.isi | WOS:A1994NR95900036 | - |
dc.publisher.place | Japan | en_US |
dc.identifier.scopusauthorid | Ohtani, Noboru=7103392778 | en_US |
dc.identifier.scopusauthorid | Mokler, Scott=6603054444 | en_US |
dc.identifier.scopusauthorid | Xie, Mao Hai=7202255416 | en_US |
dc.identifier.scopusauthorid | Zhang, Jing=36062542300 | en_US |
dc.identifier.scopusauthorid | Joyce, Bruce A=7102210065 | en_US |
dc.identifier.issnl | 0021-4922 | - |