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Article: Regularized multiframe phase-shifting algorithm for three-dimensional profilometry

TitleRegularized multiframe phase-shifting algorithm for three-dimensional profilometry
Authors
Deng, FSze, WFDeng, JFung, KSMLeung, WHLam, EY
KeywordsHigh-precision
Industrial inspections
Interferometric measurement
Iterative procedures
Multi-frame
Issue Date2012
PublisherOptical Society of America. The Journal's web site is located at http://ao.osa.org/journal/ao/about.cfm
Citation
Applied Optics, 2012, v. 51 n. 1, p. 33-42 How to Cite?
DOI: http://dx.doi.org/10.1364/AO.51.000033
AbstractIn many industrial inspection systems, it is required to have a high-precision three-dimensional measurement of an object under test. A popular technique is phase-measuring profilometry. In this paper, we develop some phase-shifting algorithms (PSAs). We propose a novel smoothness constraint in a regularization framework; we call this the R-PSA method and show how to obtain the desired phase measure with an iterative procedure. Both the simulation and experimental results verify the efficacy of our algorithm compared with current multiframe PSAs for interferometric measurements.
Persistent Identifierhttp://hdl.handle.net/10722/155723
ISSN
0003-6935
2010 Impact Factor: 1.707
ISI Accession Number ID
WOS:000299313100007
References
References in Scopus

 

DC FieldValueLanguage
dc.contributor.authorDeng, Fen_US
dc.contributor.authorSze, WFen_US
dc.contributor.authorDeng, Jen_US
dc.contributor.authorFung, KSMen_US
dc.contributor.authorLeung, WHen_US
dc.contributor.authorLam, EYen_US
dc.date.accessioned2012-08-08T08:35:01Z-
dc.date.available2012-08-08T08:35:01Z-
dc.date.issued2012en_US
dc.identifier.citationApplied Optics, 2012, v. 51 n. 1, p. 33-42en_US
dc.identifier.issn0003-6935en_US
dc.identifier.urihttp://hdl.handle.net/10722/155723-
dc.description.abstractIn many industrial inspection systems, it is required to have a high-precision three-dimensional measurement of an object under test. A popular technique is phase-measuring profilometry. In this paper, we develop some phase-shifting algorithms (PSAs). We propose a novel smoothness constraint in a regularization framework; we call this the R-PSA method and show how to obtain the desired phase measure with an iterative procedure. Both the simulation and experimental results verify the efficacy of our algorithm compared with current multiframe PSAs for interferometric measurements.en_US
dc.languageengen_US
dc.publisherOptical Society of America. The Journal's web site is located at http://ao.osa.org/journal/ao/about.cfmen_US
dc.relation.ispartofApplied Opticsen_US
dc.rightsThis paper was published in [Applied Optics] and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: [http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-51-1-33]. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.-
dc.subjectHigh-precision-
dc.subjectIndustrial inspections-
dc.subjectInterferometric measurement-
dc.subjectIterative procedures-
dc.subjectMulti-frame-
dc.titleRegularized multiframe phase-shifting algorithm for three-dimensional profilometryen_US
dc.typeArticleen_US
dc.identifier.emailLam, EY: elam@eee.hku.hken_US
dc.identifier.authorityLam, EY=rp00131en_US
dc.description.naturepublished_or_final_versionen_US
dc.identifier.doi10.1364/AO.51.000033en_US
dc.identifier.pmid22270411-
dc.identifier.scopuseid_2-s2.0-84855712259en_US
dc.identifier.hkuros200965-
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-84855712259&selection=ref&src=s&origin=recordpageen_US
dc.identifier.volume51en_US
dc.identifier.issue1en_US
dc.identifier.spage33en_US
dc.identifier.epage42en_US
dc.identifier.isiWOS:000299313100007-
dc.publisher.placeUnited Statesen_US
dc.identifier.scopusauthoridLam, EY=7102890004en_US
dc.identifier.scopusauthoridLeung, WH=36956842400en_US
dc.identifier.scopusauthoridFung, KSM=8627247700en_US
dc.identifier.scopusauthoridDeng, J=35620061100en_US
dc.identifier.scopusauthoridSze, WF=54891738600en_US
dc.identifier.scopusauthoridDeng, F=35619947800en_US
dc.identifier.issnl0003-6935-

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