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Conference Paper: Characterization of optical and structural properties of Pt-Si interface by spectroscopic ellipsometry

TitleCharacterization of optical and structural properties of Pt-Si interface by spectroscopic ellipsometry
Authors
Liu, YCChen, TPReddy, CVFung, SBeling, CD
Issue Date1994
Citation
Proceedings of the 22nd International Conference on the Physics of Semiconductors, Canada, p. 568-571 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/109815

 

DC FieldValueLanguage
dc.contributor.authorLiu, YCen_HK
dc.contributor.authorChen, TPen_HK
dc.contributor.authorReddy, CVen_HK
dc.contributor.authorFung, Sen_HK
dc.contributor.authorBeling, CDen_HK
dc.date.accessioned2010-09-26T01:38:27Z-
dc.date.available2010-09-26T01:38:27Z-
dc.date.issued1994en_HK
dc.identifier.citationProceedings of the 22nd International Conference on the Physics of Semiconductors, Canada, p. 568-571en_HK
dc.identifier.urihttp://hdl.handle.net/10722/109815-
dc.languageengen_HK
dc.relation.ispartofProceedings of the 22nd International Conference on the Physics of Semiconductors, Canadaen_HK
dc.titleCharacterization of optical and structural properties of Pt-Si interface by spectroscopic ellipsometryen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailFung, S: sfung@hkucc.hku.hken_HK
dc.identifier.emailBeling, CD: cdbeling@hkucc.hku.hken_HK
dc.identifier.authorityFung, S=rp00695en_HK
dc.identifier.authorityBeling, CD=rp00660en_HK
dc.identifier.hkuros9262en_HK
dc.identifier.spage568en_HK
dc.identifier.epage571en_HK

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