High-Stability and High-Sensitivity MISiC Hydrogen Sensor by using Hf-based Gate Dielectrics
Grant Data
Project Title
High-Stability and High-Sensitivity MISiC Hydrogen Sensor by using Hf-based Gate Dielectrics
Principal Investigator
Professor Lai, Pui To
(Principal Investigator (PI))
Duration
30
Start Date
2011-01-01
Amount
602000
Conference Title
High-Stability and High-Sensitivity MISiC Hydrogen Sensor by using Hf-based Gate Dielectrics
Keywords
device, dielectric, semconductor
Discipline
Electronics
Panel
Engineering (E)
HKU Project Code
HKU 713510E
Grant Type
General Research Fund (GRF)
Funding Year
2010
Status
Completed
All Publications
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Hydrogen gas sensing properties of Pt/Ta2O5 Schottky diodes based on Si and SiC substrates Proceeding/Conference:Sensors and Actuators A: Physical | 2011 |