Browsing by Author Zhao, L. R.

Jump to: 0-9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
Showing results 1 to 2 of 2
TitleAuthor(s)Issue DateViews
Fabrication of silica nanowire bunch arrays in SiO vapor generated by oxygen plasma etching of silicon
Proceeding/Conference:Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2013
8
2013