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| Title | Author(s) | Issue Date | |
|---|---|---|---|
Leakage mechanism in Cu damascene structure with methylsilane-doped low-k CVD oxide as intermetal dielectric Journal:IEEE Electron Device Letters | 2001 |
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Leakage mechanism in Cu damascene structure with methylsilane-doped low-k CVD oxide as intermetal dielectric Journal:IEEE Electron Device Letters | 2001 |