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Browsing by Author Shyue, J
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Showing results 1 to 1 of 1
Title
Author(s)
Issue Date
Atomic Layer Nucleation Engineering: Inhibitor-Free Area-Selective Atomic Layer Deposition of Oxide and Nitride
Journal:
Chemistry of Materials
Chou, C
Lee, W
Chuu, C
Chen, T
Hou, C
Yin, Y
Wang, T
Shyue, J
Li, L
Chen, M
2021