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| Title | Author(s) | Issue Date | |
|---|---|---|---|
Silicon Ion Implant Activation in β-(Al<inf>0.2</inf>Ga<inf>0.8</inf>)<inf>2</inf>O<inf>3</inf> Journal:Journal of Electronic Materials | 2024 |
| Title | Author(s) | Issue Date | |
|---|---|---|---|
Silicon Ion Implant Activation in β-(Al<inf>0.2</inf>Ga<inf>0.8</inf>)<inf>2</inf>O<inf>3</inf> Journal:Journal of Electronic Materials | 2024 |