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Title | Author(s) | Issue Date | |
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Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser Proceeding/Conference:Thin Solid Films | 2004 |
Title | Author(s) | Issue Date | |
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Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser Proceeding/Conference:Thin Solid Films | 2004 |