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Browsing by Author He, DS
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Showing results 1 to 1 of 1
Title
Author(s)
Issue Date
Direct visualization of beam-resist interaction volume for sub-nanometer helium ion beam-lithography
Journal:
Nanotechnology
Deng, YS
Zhuang, X
Wang, W
Gu, R
He, DS
Wang, L
Cheng, X
2021