Browsing by Author Denholm, S

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TitleAuthor(s)Issue Date
 
Ultra-shallow n +p junction formed by PH 3 and AsH 3 plasma immersion ion implantation
Journal:Microelectronics Reliability
Yang, BLCheung, NWDenholm, SShao, JWong, HLai, PTCheng, YC
2002
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