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Title | Author(s) | Issue Date | |
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Optimization of plasma nitridation for reliability enhancement of low-temperature gate dielectric in MOS devices Journal:Solid-State Electronics | 2003 |
Title | Author(s) | Issue Date | |
---|---|---|---|
Optimization of plasma nitridation for reliability enhancement of low-temperature gate dielectric in MOS devices Journal:Solid-State Electronics | 2003 |