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Title | Author(s) | Issue Date | |
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Ultrathin oxynitride formation by low energy ion-implantation Proceeding/Conference:Proceedings of International Conference on VLSI and CAD (ICVC) | 1999 |
Title | Author(s) | Issue Date | |
---|---|---|---|
Ultrathin oxynitride formation by low energy ion-implantation Proceeding/Conference:Proceedings of International Conference on VLSI and CAD (ICVC) | 1999 |