Showing results 1 to 2 of 2
Title | Author(s) | Issue Date | |
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Electrical performance and reliability of n-MOSFET's with gate dielectrics fabricated by different techniques Proceeding/Conference:International Electron Devices Meeting IEDM Technical Digest | 1994 | ||
Ultrathin oxynitride formation by low energy ion-implantation Proceeding/Conference:Proceedings of International Conference on VLSI and CAD (ICVC) | 1999 |