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Browsing by Author Chan, CL
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Showing results 59 to 59 of 59
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Title
Author(s)
Issue Date
Use of water vapor for suppressing the growth of unstable low-κ interlayer in HfTiO gate-dielectric Ge metal-oxide-semiconductor capacitors with sub-nanometer capacitance equivalent thickness
Journal:
Thin Solid Films
Xu, JP
Zou, X
Lai, PT
Li, CX
Chan, CL
2009