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Browsing by Subject oxide-semiconductor devices
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Showing results 1 to 1 of 1
Title
Author(s)
Issue Date
Improved interfacial and electrical properties of Ge MOS capacitor with ZrON/TaON multilayer composite gate dielectric by using fluorinated Si passivation layer
Journal:
Applied Physics Letters
HUANG, Y
XU, JP
LIU, L
CHENG, ZX
Lai, PT
TANG, WM
2017