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Title | Author(s) | Issue Date | |
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Steam-induced interface improvement of N2O-nitrided SiO2 grown on 6H-SiC Journal:Solid-State Electronics | 2003 |
Title | Author(s) | Issue Date | |
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Steam-induced interface improvement of N2O-nitrided SiO2 grown on 6H-SiC Journal:Solid-State Electronics | 2003 |