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Showing results 1 to 1 of 1
Title
Author(s)
Issue Date
Influence of implantation dose on electroluminescence from Si-implanted silicon nitride thin films
Journal:
Applied Physics A: Materials Science and Processing
Cen, ZH
Chen, TP
Ding, L
Liu, Z
Wong, JI
Yang, M
Goh, WP
Fung, S
2011