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Conference Paper: Modelling and control of a 2-DOF planar parallel manipulator for semiconductor packaging systems

TitleModelling and control of a 2-DOF planar parallel manipulator for semiconductor packaging systems
Authors
KeywordsComputers
Automation
Issue Date2005
PublisherIEEE.
Citation
Ieee/Asme International Conference On Advanced Intelligent Mechatronics, Aim, 2005, v. 1, p. 717-722 How to Cite?
AbstractA novel direct-drive planar parallel manipulator for high-speed and high-precision semiconductor packaging systems is presented. High precision kinematics design, significant redaction on moving mass and driving power of the actuators over traditional XY motion stages are the benefits of the proposed manipulator. The mathematical model of the manipulator is obtained using the Newton-Enter method and a practical model-based control design approach is employed to design the PID computed-torque controller. Experimental results demonstrate that the proposed planar parallel manipulator has significant improvements on motion performance in terms of positioning accuracy, settling time and stability when compared with traditional XY stages. This shows that the proposed planar parallel manipulator can provide a superior alternative for replacing traditional XY motion stages in high precision low-payload applications. © 2005 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/45884
References

 

DC FieldValueLanguage
dc.contributor.authorCheung, JWFen_HK
dc.contributor.authorHung, YSen_HK
dc.date.accessioned2007-10-30T06:37:42Z-
dc.date.available2007-10-30T06:37:42Z-
dc.date.issued2005en_HK
dc.identifier.citationIeee/Asme International Conference On Advanced Intelligent Mechatronics, Aim, 2005, v. 1, p. 717-722en_HK
dc.identifier.urihttp://hdl.handle.net/10722/45884-
dc.description.abstractA novel direct-drive planar parallel manipulator for high-speed and high-precision semiconductor packaging systems is presented. High precision kinematics design, significant redaction on moving mass and driving power of the actuators over traditional XY motion stages are the benefits of the proposed manipulator. The mathematical model of the manipulator is obtained using the Newton-Enter method and a practical model-based control design approach is employed to design the PID computed-torque controller. Experimental results demonstrate that the proposed planar parallel manipulator has significant improvements on motion performance in terms of positioning accuracy, settling time and stability when compared with traditional XY stages. This shows that the proposed planar parallel manipulator can provide a superior alternative for replacing traditional XY motion stages in high precision low-payload applications. © 2005 IEEE.en_HK
dc.format.extent554288 bytes-
dc.format.extent2762 bytes-
dc.format.mimetypeapplication/pdf-
dc.format.mimetypetext/plain-
dc.languageengen_HK
dc.publisherIEEE.en_HK
dc.relation.ispartofIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIMen_HK
dc.rightsCreative Commons: Attribution 3.0 Hong Kong License-
dc.rights©2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.en_HK
dc.subjectComputersen_HK
dc.subjectAutomationen_HK
dc.titleModelling and control of a 2-DOF planar parallel manipulator for semiconductor packaging systemsen_HK
dc.typeConference_Paperen_HK
dc.identifier.emailHung, YS:yshung@eee.hku.hken_HK
dc.identifier.authorityHung, YS=rp00220en_HK
dc.description.naturepublished_or_final_versionen_HK
dc.identifier.doi10.1109/AIM.2005.1511067en_HK
dc.identifier.scopuseid_2-s2.0-27644482808en_HK
dc.relation.referenceshttp://www.scopus.com/mlt/select.url?eid=2-s2.0-27644482808&selection=ref&src=s&origin=recordpageen_HK
dc.identifier.volume1en_HK
dc.identifier.spage717en_HK
dc.identifier.epage722en_HK
dc.identifier.scopusauthoridCheung, JWF=9037307000en_HK
dc.identifier.scopusauthoridHung, YS=8091656200en_HK

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