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Title | Author(s) | Issue Date | Views | |
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Self-limited self-perfection by liquefaction for sub-20nm trench/line fabrication Journal:Nanotechnology | 2009 | 206 |
Title | Author(s) | Issue Date | Views | |
---|---|---|---|---|
Self-limited self-perfection by liquefaction for sub-20nm trench/line fabrication Journal:Nanotechnology | 2009 | 206 |