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- Publisher Website: 10.1109/ICSENS.2015.7370661
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Conference Paper: Improving the reliability of carbon nanotube based infrared sensors
Title | Improving the reliability of carbon nanotube based infrared sensors |
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Authors | |
Issue Date | 2015 |
Publisher | IEEE. The Journal's web site is located at http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=7361 |
Citation | The 14th IEEE Sensors Conference (IEEE SENSORS 2015), Busan, Korea, 1-4 November 2015. In Conference Proceedings, 2015, p. 1-4 How to Cite? |
Abstract | In this paper, a reliable and stable carbon nanotube based infrared photodetector was proposed. It was not only for the fundamental understanding of CNT photoresponse induced processes, but also for the development of a new infrared sensitive material with unique optical and conductivity features. The temperature and humidity changes would dominate sensor response in nanoscale materials. In the proposed design, the sandwich-structured sensor was fabricated within two polymer layers. The substrate polyimide provided sensor with high bending stiffness, and top parylene packing blocked humidity environmental issues. At the same time, the fabrication process was optimized by real time electrical detection dielectrophoresis and multiple annealing to improving fabrication yield and sensor performance. In order to make measurements under same condition, a digital microscope and precise linear stage based measurement system was introduced. The experimental results showed that the photodetectors had more uniformities and stable photoresponse. © 2015 IEEE. |
Persistent Identifier | http://hdl.handle.net/10722/235013 |
ISBN | |
ISSN | 2023 Impact Factor: 4.3 2023 SCImago Journal Rankings: 1.084 |
DC Field | Value | Language |
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dc.contributor.author | Chen, L | - |
dc.contributor.author | Xi, N | - |
dc.contributor.author | Zhou, Z | - |
dc.contributor.author | Song, B | - |
dc.contributor.author | Yang, Y | - |
dc.contributor.author | Hao, Y | - |
dc.contributor.author | Sun, Z | - |
dc.date.accessioned | 2016-10-14T13:50:43Z | - |
dc.date.available | 2016-10-14T13:50:43Z | - |
dc.date.issued | 2015 | - |
dc.identifier.citation | The 14th IEEE Sensors Conference (IEEE SENSORS 2015), Busan, Korea, 1-4 November 2015. In Conference Proceedings, 2015, p. 1-4 | - |
dc.identifier.isbn | 978-147998202-8 | - |
dc.identifier.issn | 1530-437X | - |
dc.identifier.uri | http://hdl.handle.net/10722/235013 | - |
dc.description.abstract | In this paper, a reliable and stable carbon nanotube based infrared photodetector was proposed. It was not only for the fundamental understanding of CNT photoresponse induced processes, but also for the development of a new infrared sensitive material with unique optical and conductivity features. The temperature and humidity changes would dominate sensor response in nanoscale materials. In the proposed design, the sandwich-structured sensor was fabricated within two polymer layers. The substrate polyimide provided sensor with high bending stiffness, and top parylene packing blocked humidity environmental issues. At the same time, the fabrication process was optimized by real time electrical detection dielectrophoresis and multiple annealing to improving fabrication yield and sensor performance. In order to make measurements under same condition, a digital microscope and precise linear stage based measurement system was introduced. The experimental results showed that the photodetectors had more uniformities and stable photoresponse. © 2015 IEEE. | - |
dc.language | eng | - |
dc.publisher | IEEE. The Journal's web site is located at http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=7361 | - |
dc.relation.ispartof | IEEE Sensors Journal | - |
dc.rights | IEEE Sensors Journal. Copyright © IEEE. | - |
dc.rights | ©2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. | - |
dc.title | Improving the reliability of carbon nanotube based infrared sensors | - |
dc.type | Conference_Paper | - |
dc.identifier.email | Xi, N: xining@hku.hk | - |
dc.identifier.authority | Xi, N=rp02044 | - |
dc.description.nature | link_to_subscribed_fulltext | - |
dc.identifier.doi | 10.1109/ICSENS.2015.7370661 | - |
dc.identifier.scopus | eid_2-s2.0-84963571320 | - |
dc.identifier.hkuros | 269345 | - |
dc.identifier.spage | 1 | - |
dc.identifier.epage | 4 | - |
dc.publisher.place | United States | - |
dc.customcontrol.immutable | sml 161019 | - |
dc.identifier.issnl | 1530-437X | - |