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Conference Paper: Active landmark configuration for accurate nano-positioning

TitleActive landmark configuration for accurate nano-positioning
Authors
Issue Date2013
Citation
IFAC Proceedings Volumes (IFAC-PapersOnline), 2013, p. 594-599 How to Cite?
AbstractThe spatial uncertainties of atom force microscopy (AFM) tip position hinder the AFM based nano-manipulation. Although the landmark based tip localization can be applied to improve the tip position accuracy in the task space, the PZT nonlinearity and system drift are still a challenge to compensation performance when the tip is positioned far from the landmark. Therefore this paper proposes an active landmark configuration. This method first estimates the nearby area called as the landmark domain around the target position, and then actively manipulates the landmark into the landmark domain by using virtual hand to improve the positioning accuracy. Simulation and experiment illustrate the validity of the proposed method. © 2013 IFAC.
Persistent Identifierhttp://hdl.handle.net/10722/213329
ISSN

 

DC FieldValueLanguage
dc.contributor.authorYuan, Shuai-
dc.contributor.authorLiu, Lianqing-
dc.contributor.authorWang, Zhidong-
dc.contributor.authorXi, Ning-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorDong, Zaili-
dc.date.accessioned2015-07-28T04:06:54Z-
dc.date.available2015-07-28T04:06:54Z-
dc.date.issued2013-
dc.identifier.citationIFAC Proceedings Volumes (IFAC-PapersOnline), 2013, p. 594-599-
dc.identifier.issn1474-6670-
dc.identifier.urihttp://hdl.handle.net/10722/213329-
dc.description.abstractThe spatial uncertainties of atom force microscopy (AFM) tip position hinder the AFM based nano-manipulation. Although the landmark based tip localization can be applied to improve the tip position accuracy in the task space, the PZT nonlinearity and system drift are still a challenge to compensation performance when the tip is positioned far from the landmark. Therefore this paper proposes an active landmark configuration. This method first estimates the nearby area called as the landmark domain around the target position, and then actively manipulates the landmark into the landmark domain by using virtual hand to improve the positioning accuracy. Simulation and experiment illustrate the validity of the proposed method. © 2013 IFAC.-
dc.languageeng-
dc.relation.ispartofIFAC Proceedings Volumes (IFAC-PapersOnline)-
dc.titleActive landmark configuration for accurate nano-positioning-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.3182/20130410-3-CN-2034.00017-
dc.identifier.scopuseid_2-s2.0-84881080275-
dc.identifier.spage594-
dc.identifier.epage599-

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