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Conference Paper: Optimal control of flexible end effector in AFM based nanomanipulation

TitleOptimal control of flexible end effector in AFM based nanomanipulation
Authors
KeywordsActive probe
Nanomanipulation
Flexible structure
Atomic Force Microscopy (AFM)
Issue Date2005
Citation
2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS, 2005, p. 1160-1165 How to Cite?
AbstractAtomic Force Microscope (AFM) based nanomanipulation has been extensively investigated for many years. However, the efficiency and accuracy of the AFM based nanomanipulation is still a major issue due to the nonlinearities and uncertainties in nanomanipulation operations. The deformation of the cantilever caused by manipulation force, in our experience, is one of the most major nonlinearities and uncertainties. It causes difficulties in precisely controlling the tip position, which will cause the tip to miss the position of the object. In order to solve this problem, the traditional approach is to use a rigid cantilever. However, this will significantly reduce the sensitivity of the force feeling during the manipulation, which is essential for achieving an efficient and reliable nanomanipulation. An active AFM probe is used to solve this problem by directly controlling the cantilever's flexibility or rigidity during manipulation. An infinite dimensional model of the active probe is developed. Control of the active probe employing an optimal LQR control law is also implemented. The experimental results have verified the theoretical model and demonstrated that the precise position control and high sensitive interaction force measurement can be achieved simultaneously. © 2005 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/213180

 

DC FieldValueLanguage
dc.contributor.authorZhang, Jiangbo-
dc.contributor.authorXi, Ning-
dc.contributor.authorLi, Guangyong-
dc.date.accessioned2015-07-28T04:06:25Z-
dc.date.available2015-07-28T04:06:25Z-
dc.date.issued2005-
dc.identifier.citation2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS, 2005, p. 1160-1165-
dc.identifier.urihttp://hdl.handle.net/10722/213180-
dc.description.abstractAtomic Force Microscope (AFM) based nanomanipulation has been extensively investigated for many years. However, the efficiency and accuracy of the AFM based nanomanipulation is still a major issue due to the nonlinearities and uncertainties in nanomanipulation operations. The deformation of the cantilever caused by manipulation force, in our experience, is one of the most major nonlinearities and uncertainties. It causes difficulties in precisely controlling the tip position, which will cause the tip to miss the position of the object. In order to solve this problem, the traditional approach is to use a rigid cantilever. However, this will significantly reduce the sensitivity of the force feeling during the manipulation, which is essential for achieving an efficient and reliable nanomanipulation. An active AFM probe is used to solve this problem by directly controlling the cantilever's flexibility or rigidity during manipulation. An infinite dimensional model of the active probe is developed. Control of the active probe employing an optimal LQR control law is also implemented. The experimental results have verified the theoretical model and demonstrated that the precise position control and high sensitive interaction force measurement can be achieved simultaneously. © 2005 IEEE.-
dc.languageeng-
dc.relation.ispartof2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS-
dc.subjectActive probe-
dc.subjectNanomanipulation-
dc.subjectFlexible structure-
dc.subjectAtomic Force Microscopy (AFM)-
dc.titleOptimal control of flexible end effector in AFM based nanomanipulation-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/IROS.2005.1545136-
dc.identifier.scopuseid_2-s2.0-79957986873-
dc.identifier.spage1160-
dc.identifier.epage1165-

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