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Conference Paper: AFM tip on-line positioning by using the landmark in nano-manipulation

TitleAFM tip on-line positioning by using the landmark in nano-manipulation
Authors
Issue Date2010
Citation
2010 IEEE Nanotechnology Materials and Devices Conference, NMDC2010, 2010, p. 75-80 How to Cite?
AbstractAFM has been proved to be a powerful nano-manipulation tool taking advantage of its ultra high resolution and precision. However the large spatial uncertainties associated with AFM tip positioning dual to the PZT nonlinearity and thermal drift are still challenging problems, which hinders its wide application especially in building complex structures In this paper, a probabilistic approach combined with the Kalman filter based localization algorithm is proposed to improve the accuracy of the tip positioning in the task space coordinate frame. A motion model based on the Prandtl-Ishlinskii (PI) model is established, the distribution of model error is statistically obtained through the experimental calibration process. In addition, to further reduce the tip position uncertainties, an environment measurement models is developed through sensing the landmark intermittently with local scanning method during manipulation. Both the simulations results and experimental results are presented to demonstrate the validity of the proposed method. © 2010 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/213139

 

DC FieldValueLanguage
dc.contributor.authorYuan, Shuai-
dc.contributor.authorLiu, Lianqing-
dc.contributor.authorWang, Zhidong-
dc.contributor.authorXi, Ning-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorDong, Zaili-
dc.contributor.authorWang, Zhiyu-
dc.date.accessioned2015-07-28T04:06:15Z-
dc.date.available2015-07-28T04:06:15Z-
dc.date.issued2010-
dc.identifier.citation2010 IEEE Nanotechnology Materials and Devices Conference, NMDC2010, 2010, p. 75-80-
dc.identifier.urihttp://hdl.handle.net/10722/213139-
dc.description.abstractAFM has been proved to be a powerful nano-manipulation tool taking advantage of its ultra high resolution and precision. However the large spatial uncertainties associated with AFM tip positioning dual to the PZT nonlinearity and thermal drift are still challenging problems, which hinders its wide application especially in building complex structures In this paper, a probabilistic approach combined with the Kalman filter based localization algorithm is proposed to improve the accuracy of the tip positioning in the task space coordinate frame. A motion model based on the Prandtl-Ishlinskii (PI) model is established, the distribution of model error is statistically obtained through the experimental calibration process. In addition, to further reduce the tip position uncertainties, an environment measurement models is developed through sensing the landmark intermittently with local scanning method during manipulation. Both the simulations results and experimental results are presented to demonstrate the validity of the proposed method. © 2010 IEEE.-
dc.languageeng-
dc.relation.ispartof2010 IEEE Nanotechnology Materials and Devices Conference, NMDC2010-
dc.titleAFM tip on-line positioning by using the landmark in nano-manipulation-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/NMDC.2010.5651954-
dc.identifier.scopuseid_2-s2.0-78651487159-
dc.identifier.spage75-
dc.identifier.epage80-

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