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Conference Paper: A probabilistic approach for on-line positioning in nano manipulations

TitleA probabilistic approach for on-line positioning in nano manipulations
Authors
KeywordsKalman filter
PI
Probability
AFM
Nanomanipulation
Issue Date2010
Citation
Proceedings of the World Congress on Intelligent Control and Automation (WCICA), 2010, p. 450-455 How to Cite?
AbstractNanomanipulation and nanoassembly using atom force microscopy (AFM) is a potential and promising technology for nanomanufacturing. Precise position of the tip of AFM is important to increase the accuracy and efficiency on fabricate complex nanostructures. However at the nano-scale, it is difficult to acquire the tip position expressed by the coordinate in real time due to PZT nonlinearity and thermal drift through the general measure. In this paper, a probabilistic approach incorporating a Kalman filter based localization algorithm is introduced into the on-line estimation of the tip position expressed by probability distribution known as probability density function. A probabilistic motion model of AFM tip is introduced that consists of a PZT dynamic model based on the Prandtl-Ishlinskii (PI) model, and motion error distribution obtained from calibration experiments. An observation model by using a local scanning algorithm is proposed and the change of uncertainty distribution on scanning landmarks, e.g. nano-particles, near the target position is analyzed. Some experiment results are included for showing the motion error distribution and a simulation result is presented to illustrate the validity of the proposed method. © 2010 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/213124

 

DC FieldValueLanguage
dc.contributor.authorYuan, Shuai-
dc.contributor.authorLiu, Lianqing-
dc.contributor.authorWang, Zhidong-
dc.contributor.authorXi, Ning-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorDong, Zaili-
dc.contributor.authorWang, Zhiyu-
dc.date.accessioned2015-07-28T04:06:12Z-
dc.date.available2015-07-28T04:06:12Z-
dc.date.issued2010-
dc.identifier.citationProceedings of the World Congress on Intelligent Control and Automation (WCICA), 2010, p. 450-455-
dc.identifier.urihttp://hdl.handle.net/10722/213124-
dc.description.abstractNanomanipulation and nanoassembly using atom force microscopy (AFM) is a potential and promising technology for nanomanufacturing. Precise position of the tip of AFM is important to increase the accuracy and efficiency on fabricate complex nanostructures. However at the nano-scale, it is difficult to acquire the tip position expressed by the coordinate in real time due to PZT nonlinearity and thermal drift through the general measure. In this paper, a probabilistic approach incorporating a Kalman filter based localization algorithm is introduced into the on-line estimation of the tip position expressed by probability distribution known as probability density function. A probabilistic motion model of AFM tip is introduced that consists of a PZT dynamic model based on the Prandtl-Ishlinskii (PI) model, and motion error distribution obtained from calibration experiments. An observation model by using a local scanning algorithm is proposed and the change of uncertainty distribution on scanning landmarks, e.g. nano-particles, near the target position is analyzed. Some experiment results are included for showing the motion error distribution and a simulation result is presented to illustrate the validity of the proposed method. © 2010 IEEE.-
dc.languageeng-
dc.relation.ispartofProceedings of the World Congress on Intelligent Control and Automation (WCICA)-
dc.subjectKalman filter-
dc.subjectPI-
dc.subjectProbability-
dc.subjectAFM-
dc.subjectNanomanipulation-
dc.titleA probabilistic approach for on-line positioning in nano manipulations-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/WCICA.2010.5553794-
dc.identifier.scopuseid_2-s2.0-77958149997-
dc.identifier.spage450-
dc.identifier.epage455-

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