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Conference Paper: Development of AFM based on nano positioning stage

TitleDevelopment of AFM based on nano positioning stage
Authors
KeywordsKinematic coupling
AFM force curve
AFM
Nano positioning stage
Issue Date2007
Citation
Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 2007, p. 21-25 How to Cite?
AbstractA single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner. But due to the kinematic coupling of the single tube during its bending motion, there usually exist two kinds of structure errors: vertical cross coupling error and scanning size error which affect the precision of nano observation and manipulation. In this paper, a new AFM with nano positioning stage as its scanner is developed. The stage has three PZT actuators and can move in three directions with high precision without kinematic coupling, thus the two structure errors are eliminated effectively in the new AFM. Some development results are presented and the experimental results validate the performance of the AFM. © 2007 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/212939

 

DC FieldValueLanguage
dc.contributor.authorJiao, Niandong-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorXi, Ning-
dc.contributor.authorDong, Zaili-
dc.date.accessioned2015-07-28T04:05:31Z-
dc.date.available2015-07-28T04:05:31Z-
dc.date.issued2007-
dc.identifier.citationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 2007, p. 21-25-
dc.identifier.urihttp://hdl.handle.net/10722/212939-
dc.description.abstractA single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner. But due to the kinematic coupling of the single tube during its bending motion, there usually exist two kinds of structure errors: vertical cross coupling error and scanning size error which affect the precision of nano observation and manipulation. In this paper, a new AFM with nano positioning stage as its scanner is developed. The stage has three PZT actuators and can move in three directions with high precision without kinematic coupling, thus the two structure errors are eliminated effectively in the new AFM. Some development results are presented and the experimental results validate the performance of the AFM. © 2007 IEEE.-
dc.languageeng-
dc.relation.ispartofProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007-
dc.subjectKinematic coupling-
dc.subjectAFM force curve-
dc.subjectAFM-
dc.subjectNano positioning stage-
dc.titleDevelopment of AFM based on nano positioning stage-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/NEMS.2007.352023-
dc.identifier.scopuseid_2-s2.0-34548140622-
dc.identifier.spage21-
dc.identifier.epage25-

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