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Conference Paper: A study on theoretical nano forces in AFM based nanomanipulation

TitleA study on theoretical nano forces in AFM based nanomanipulation
Authors
KeywordsForce curve
Atomic force microscope (AFM)
Nano force analysis
Nanomanipulation
Issue Date2007
Citation
Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 2007, p. 917-921 How to Cite?
AbstractAs it is important to understand the basic mechanics principle in nanofabrication process, much research has been done about nano mechanics with different tools in different nano enviroments, and various kinds of nano force formula have been proposed. However, as the special case of AFM based nanomanipulation is considered, little about its mechanics principle under the micro probe's operation is known, such as what kinds of nano forces are the decisive factors and how they work, which are important to perform accurate control in nanomanipulation. To explore this subject, nano forces among tip, substrate and particle are analyzed, and simulation & experiments are performed to verify the rationality of the analysis. © 2007 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/212938

 

DC FieldValueLanguage
dc.contributor.authorTian, Xiaojun-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorXi, Ning-
dc.contributor.authorDong, Zaili-
dc.date.accessioned2015-07-28T04:05:30Z-
dc.date.available2015-07-28T04:05:30Z-
dc.date.issued2007-
dc.identifier.citationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, 2007, p. 917-921-
dc.identifier.urihttp://hdl.handle.net/10722/212938-
dc.description.abstractAs it is important to understand the basic mechanics principle in nanofabrication process, much research has been done about nano mechanics with different tools in different nano enviroments, and various kinds of nano force formula have been proposed. However, as the special case of AFM based nanomanipulation is considered, little about its mechanics principle under the micro probe's operation is known, such as what kinds of nano forces are the decisive factors and how they work, which are important to perform accurate control in nanomanipulation. To explore this subject, nano forces among tip, substrate and particle are analyzed, and simulation & experiments are performed to verify the rationality of the analysis. © 2007 IEEE.-
dc.languageeng-
dc.relation.ispartofProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007-
dc.subjectForce curve-
dc.subjectAtomic force microscope (AFM)-
dc.subjectNano force analysis-
dc.subjectNanomanipulation-
dc.titleA study on theoretical nano forces in AFM based nanomanipulation-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/NEMS.2007.352168-
dc.identifier.scopuseid_2-s2.0-34548137686-
dc.identifier.spage917-
dc.identifier.epage921-

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