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Conference Paper: Accurate positioning of AFM probe for AFM based robotic nanomanipulation system

TitleAccurate positioning of AFM probe for AFM based robotic nanomanipulation system
Authors
KeywordsAFM probe positioning Reappearing the scanning trajectory Kinematicss coupling errors Cantilever deflections Nanomanipulation
Issue Date2006
Citation
IEEE International Conference on Intelligent Robots and Systems, 2006, p. 1910-1914 How to Cite?
AbstractFor AFM based robotic nanomanipulation system without displacement sensor, one of the key technical problems is to realize high accurate positioning of the AFM probe. To solve the problem, based on the hysteresis & nonlinear characteristics analysis of AFM PZT actuator, a new actuating method called "actuating method based on reappearing the scanning trajectory" is presented to actuate the PZT actuator. Then two kinds of probe positioning errors, namely kinematics coupling errors due to tube actuator's bend motion and probe tip's positioning errors caused by cantilever deflections, are compensated to further improve the probe's positioning accuracy. Nanopatterning experiments are performed to verify the effectiveness of the new actuating method and the compensation methods of probe positioning errors. © 2006 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/212921

 

DC FieldValueLanguage
dc.contributor.authorTian, Xiaojun-
dc.contributor.authorWang, Yuechao-
dc.contributor.authorXi, Ning-
dc.contributor.authorDong, Zaili-
dc.contributor.authorLi, Wenjung-
dc.date.accessioned2015-07-28T04:05:27Z-
dc.date.available2015-07-28T04:05:27Z-
dc.date.issued2006-
dc.identifier.citationIEEE International Conference on Intelligent Robots and Systems, 2006, p. 1910-1914-
dc.identifier.urihttp://hdl.handle.net/10722/212921-
dc.description.abstractFor AFM based robotic nanomanipulation system without displacement sensor, one of the key technical problems is to realize high accurate positioning of the AFM probe. To solve the problem, based on the hysteresis & nonlinear characteristics analysis of AFM PZT actuator, a new actuating method called "actuating method based on reappearing the scanning trajectory" is presented to actuate the PZT actuator. Then two kinds of probe positioning errors, namely kinematics coupling errors due to tube actuator's bend motion and probe tip's positioning errors caused by cantilever deflections, are compensated to further improve the probe's positioning accuracy. Nanopatterning experiments are performed to verify the effectiveness of the new actuating method and the compensation methods of probe positioning errors. © 2006 IEEE.-
dc.languageeng-
dc.relation.ispartofIEEE International Conference on Intelligent Robots and Systems-
dc.subjectAFM probe positioning Reappearing the scanning trajectory Kinematicss coupling errors Cantilever deflections Nanomanipulation-
dc.titleAccurate positioning of AFM probe for AFM based robotic nanomanipulation system-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.doi10.1109/IROS.2006.282317-
dc.identifier.scopuseid_2-s2.0-34250659674-
dc.identifier.spage1910-
dc.identifier.epage1914-

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