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Conference Paper: Dynamic force measurement for microassembly of surface MEMS structures

TitleDynamic force measurement for microassembly of surface MEMS structures
Authors
Issue Date2005
Citation
2005 IEEE International Conference on Robotics and Biomimetics, ROBIO, 2005, v. 2005, p. 646-651 How to Cite?
AbstractIn-situ PVDF films bonded to the surface of flexible cantilever structure act as the effective micro-force sensors, they are mostly modelled using quasi-static relationship. However, such sensors are usually a significantly compliant and easily deformable structure in order to reach highly sensitive performance for micro force detection. As a result, this may be reasonable to consider bandwidth measurement and frequency response for achievement of high accuracy, and thus a dynamic modelling of such sensors become essentially necessary. In this paper, the 1-D and 2-D cantilever beam based micro-force sensors are designed and modelled on the basis of distributed parameter approach using Bernoulli-Euler equation. The resulting dynamic models can greatly enhance the measurement of micro force in microassembly. To verify the performance of the developed dynamic micro-force sensor, this dynamic sensor has been successfully used to guide a remote microassembly of the surface MEMS structures with microforce/visual feedback via Internet between USA and Hong Kong. © 2005 IEEE.
Persistent Identifierhttp://hdl.handle.net/10722/212913

 

DC FieldValueLanguage
dc.contributor.authorShen, Yantao-
dc.contributor.authorXi, Ning-
dc.contributor.authorLi, Wen J.-
dc.date.accessioned2015-07-28T04:05:25Z-
dc.date.available2015-07-28T04:05:25Z-
dc.date.issued2005-
dc.identifier.citation2005 IEEE International Conference on Robotics and Biomimetics, ROBIO, 2005, v. 2005, p. 646-651-
dc.identifier.urihttp://hdl.handle.net/10722/212913-
dc.description.abstractIn-situ PVDF films bonded to the surface of flexible cantilever structure act as the effective micro-force sensors, they are mostly modelled using quasi-static relationship. However, such sensors are usually a significantly compliant and easily deformable structure in order to reach highly sensitive performance for micro force detection. As a result, this may be reasonable to consider bandwidth measurement and frequency response for achievement of high accuracy, and thus a dynamic modelling of such sensors become essentially necessary. In this paper, the 1-D and 2-D cantilever beam based micro-force sensors are designed and modelled on the basis of distributed parameter approach using Bernoulli-Euler equation. The resulting dynamic models can greatly enhance the measurement of micro force in microassembly. To verify the performance of the developed dynamic micro-force sensor, this dynamic sensor has been successfully used to guide a remote microassembly of the surface MEMS structures with microforce/visual feedback via Internet between USA and Hong Kong. © 2005 IEEE.-
dc.languageeng-
dc.relation.ispartof2005 IEEE International Conference on Robotics and Biomimetics, ROBIO-
dc.titleDynamic force measurement for microassembly of surface MEMS structures-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-33947694276-
dc.identifier.volume2005-
dc.identifier.spage646-
dc.identifier.epage651-

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