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Conference Paper: Force-Guided Assembly of Micro Mirrors

TitleForce-Guided Assembly of Micro Mirrors
Authors
Issue Date2003
Citation
IEEE International Conference on Intelligent Robots and Systems, 2003, v. 3, p. 2149-2154 How to Cite?
AbstractThis paper aims at developing the force-guided microassembly technology with in-situ PVDF piezoelectric force sensing and control. By using the designed force sensors with the effective signal processing techniques, the micro contact force/impact signal and its derivative can be extracted and processed. Furthermore, based on a new sensor-referenced control scheme, micro mirrors can be reliably assembled by regulating the micro contact force. Experimental results verify the performance of the developed micro force sensing and control system. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices.
Persistent Identifierhttp://hdl.handle.net/10722/212783

 

DC FieldValueLanguage
dc.contributor.authorShen, Yantao-
dc.contributor.authorXi, Ning-
dc.contributor.authorLi, Wen Jung-
dc.date.accessioned2015-07-28T04:05:00Z-
dc.date.available2015-07-28T04:05:00Z-
dc.date.issued2003-
dc.identifier.citationIEEE International Conference on Intelligent Robots and Systems, 2003, v. 3, p. 2149-2154-
dc.identifier.urihttp://hdl.handle.net/10722/212783-
dc.description.abstractThis paper aims at developing the force-guided microassembly technology with in-situ PVDF piezoelectric force sensing and control. By using the designed force sensors with the effective signal processing techniques, the micro contact force/impact signal and its derivative can be extracted and processed. Furthermore, based on a new sensor-referenced control scheme, micro mirrors can be reliably assembled by regulating the micro contact force. Experimental results verify the performance of the developed micro force sensing and control system. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices.-
dc.languageeng-
dc.relation.ispartofIEEE International Conference on Intelligent Robots and Systems-
dc.titleForce-Guided Assembly of Micro Mirrors-
dc.typeConference_Paper-
dc.description.natureLink_to_subscribed_fulltext-
dc.identifier.scopuseid_2-s2.0-0347409421-
dc.identifier.volume3-
dc.identifier.spage2149-
dc.identifier.epage2154-

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