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Conference Paper: Robotic Alignment and Inspection System for Semiconductor Processing

TitleRobotic Alignment and Inspection System for Semiconductor Processing
Authors
Huang, George
Issue Date1984
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
Citation
Proceedings of SPIE - The International Society for Optical Engineering, 1984, v. 449 pt 2, p. 644-652 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/158803
ISSN
0277-786X
2023 SCImago Journal Rankings: 0.152

 

DC FieldValueLanguage
dc.contributor.authorHuang, Georgeen_US
dc.date.accessioned2012-08-08T09:03:22Z-
dc.date.available2012-08-08T09:03:22Z-
dc.date.issued1984en_US
dc.identifier.citationProceedings of SPIE - The International Society for Optical Engineering, 1984, v. 449 pt 2, p. 644-652en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/10722/158803-
dc.languageengen_US
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xmlen_US
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_US
dc.titleRobotic Alignment and Inspection System for Semiconductor Processingen_US
dc.typeConference_Paperen_US
dc.identifier.scopuseid_2-s2.0-0021122720en_US
dc.identifier.volume449en_US
dc.identifier.issuept 2en_US
dc.identifier.spage644en_US
dc.identifier.epage652en_US
dc.publisher.placeUnited Statesen_US
dc.identifier.issnl0277-786X-

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