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Conference Paper: ROBOTIC ALIGNMENT AND INSPECTION SYSTEM FOR SEMICONDUCTOR PROCESSING.

TitleROBOTIC ALIGNMENT AND INSPECTION SYSTEM FOR SEMICONDUCTOR PROCESSING.
Authors
Issue Date1984
PublisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xml
Citation
Proceedings Of Spie - The International Society For Optical Engineering, 1984, v. 449 pt 2, p. 644-652 How to Cite?
Persistent Identifierhttp://hdl.handle.net/10722/158803
ISSN

 

DC FieldValueLanguage
dc.contributor.authorHuang, Georgeen_US
dc.date.accessioned2012-08-08T09:03:22Z-
dc.date.available2012-08-08T09:03:22Z-
dc.date.issued1984en_US
dc.identifier.citationProceedings Of Spie - The International Society For Optical Engineering, 1984, v. 449 pt 2, p. 644-652en_US
dc.identifier.issn0277-786Xen_US
dc.identifier.urihttp://hdl.handle.net/10722/158803-
dc.languageengen_US
dc.publisherS P I E - International Society for Optical Engineering. The Journal's web site is located at http://spie.org/x1848.xmlen_US
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineeringen_US
dc.titleROBOTIC ALIGNMENT AND INSPECTION SYSTEM FOR SEMICONDUCTOR PROCESSING.en_US
dc.typeConference_Paperen_US
dc.description.naturelink_to_subscribed_fulltexten_US
dc.identifier.scopuseid_2-s2.0-0021122720en_US
dc.identifier.volume449en_US
dc.identifier.issuept 2en_US
dc.identifier.spage644en_US
dc.identifier.epage652en_US
dc.publisher.placeUnited Statesen_US

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