Showing results 1 to 1 of 1
Title | Author(s) | Issue Date | |
---|---|---|---|
Improvement of SiGe oxide grown by electron cyclotron resonance using H2O vapor annealing Journal:Applied Physics Letters | 1996 |
Title | Author(s) | Issue Date | |
---|---|---|---|
Improvement of SiGe oxide grown by electron cyclotron resonance using H2O vapor annealing Journal:Applied Physics Letters | 1996 |